Microliquids GmbH Advanced technologies for science and industry
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  Products I

Liquid polymer and water beam source

efficient and low cost EUV source

 

Compact setup for water and liquid polymers. In the case of water the high pressure liquid beam in vacuum is generated with an HPLC-pump.

 

Line spectrum of our liquid polymer source. Note, a large fraction of the total line emission between 9 and 18 µm is emitted in one single line at 12.8 nm. The conversion efficiency is larger than 0.5 % depending upon the source conditions.
    high precision nozzles

Microliquids GmbH provides high quality compounds that are tested extensively prior to delivery in our laboratory.

A He-Ne laser is used to determine the tilt angle of the liquid jet with respect to the nozzle axis. The laser diffraction on the laminar part of the liquid jet results in a Fraunhofer- or Mie- diffraction pattern which is aligned orthogonal to the liquid jet.

In a second experiment the nozzle assembly is lowered until diffraction occurs on the quartz capillary itself. Comparing both diffraction patterns the tilt angle can be directly deduced. This method allows for a contact-free measurement of the tilt angle even in case of short liquid segments.
The deviation of the liquid jet from the main axis can be determined at an accuracy of <0.5° mm and can easily be verified by the user.

 

The laser plasma is a point source that can be refocussed and imaged which opens up several applications (including XUV microscopy).

 

 

 

 

 

 

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